Inventor
SANGPLUNG SAANGRUT
US8 patents
Patents
8 patentsUS10741365B2Aug 11, 2020
Low volume showerhead with porous baffle
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US10378107B2Aug 13, 2019
Low volume showerhead with faceplate holes for improved flow uniformity
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US9920844B2Mar 20, 2018
Valve manifold deadleg elimination via reentrant flow path
LAM RES CORP3 citations72
US9631276B2Apr 25, 2017
Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition
LAM RES CORP2 citations72
US10781516B2Sep 22, 2020
Chemical deposition chamber having gas seal
LAM RES CORP2 citations71
US9460915B2Oct 4, 2016
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges
LAM RES CORP3 citations71
US10323323B2Jun 18, 2019
Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition
LAM RES CORP0 citations51
US9852901B2Dec 26, 2017
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges
LAM RES CORP0 citations51