Inventor
PASQUALE FRANK
US14 patents
⚠️ This page may combine multiple inventors who share the name “PASQUALE FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
13 patentsUS9793096B2Oct 17, 2017
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
LAM RES CORP16 citations92
US9617638B2Apr 11, 2017
Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system
LAM RES CORP9 citations84
US10665429B2May 26, 2020
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
LAM RES CORP6 citations83
US10378107B2Aug 13, 2019
Low volume showerhead with faceplate holes for improved flow uniformity
LAM RES CORP11 citations83
US10622243B2Apr 14, 2020
Planar substrate edge contact with open volume equalization pathways and side containment
LAM RES CORP2 citations72
US9920844B2Mar 20, 2018
Valve manifold deadleg elimination via reentrant flow path
LAM RES CORP3 citations72
US9631276B2Apr 25, 2017
Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition
LAM RES CORP2 citations72
US9460915B2Oct 4, 2016
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges
LAM RES CORP3 citations71
US11443975B2Sep 13, 2022
Planar substrate edge contact with open volume equalization pathways and side containment
LAM RES CORP0 citations62
US11127567B2Sep 21, 2021
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
LAM RES CORP0 citations62
US10323323B2Jun 18, 2019
Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition
LAM RES CORP0 citations51
US9852901B2Dec 26, 2017
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges
LAM RES CORP0 citations51
US9970108B2May 15, 2018
Systems and methods for vapor delivery in a substrate processing system
LAM RES CORP0 citations37