P

Inventor

CHANG HAO-MING

TW59 patents
⚠️ This page may combine multiple inventors who share the name “CHANG HAO-MING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

27 patents
US11209736B2Dec 28, 2021

Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US11796909B2Oct 24, 2023

Structure and method of reticle pod having inspection window

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11314164B2Apr 26, 2022

Structure and method of reticle pod having inspection window

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US10859905B2Dec 8, 2020

Photomask and method for forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10508953B2Dec 17, 2019

Method and system for processing substrate by chemical solution in semiconductor manufacturing fabrication

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US11815802B2Nov 14, 2023

Photomask repairing method and system thereof

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations64
US12358030B2Jul 15, 2025

Method for cleaning substrate

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12055850B2Aug 6, 2024

Fabricating method of photomask, photomask structure thereof, and semiconductor manufacturing method using the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11829071B2Nov 28, 2023

Photomask and method of repairing photomask

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11691187B2Jul 4, 2023

Method for cleaning substrate

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11662660B2May 30, 2023

Fabricating method of photomask, photomask structure thereof, and semiconductor manufacturing method using the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11474428B2Oct 18, 2022

Photomask and method of repairing photomask

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11099477B2Aug 24, 2021

Photomask and method of repairing photomask

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11079671B2Aug 3, 2021

Fabricating method of photomask, photomask structure thereof, and semiconductor manufacturing method using the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12463029B2Nov 4, 2025

Cleaning method, semiconductor manufacturing method and a system thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12248245B2Mar 11, 2025

Structure and method of reticle pod having inspection window

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11681215B2Jun 20, 2023

Photomask and method for forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11600484B2Mar 7, 2023

Cleaning method, semiconductor manufacturing method and a system thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11480869B2Oct 25, 2022

Photomask with enhanced contamination control and method of forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12282260B2Apr 22, 2025

Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12087579B2Sep 10, 2024

Method for forming semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11036129B2Jun 15, 2021

Photomask and method for forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12411404B2Sep 9, 2025

Method of manufacturing phase shift photo masks

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11906898B2Feb 20, 2024

Method of manufacturing phase shift photo masks

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11567400B2Jan 31, 2023

Method of fabricating a photomask and method of inspecting a photomask

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11048163B2Jun 29, 2021

Inspection method of a photomask and an inspection system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US12140858B2Nov 12, 2024

Photomask repairing method and system thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54

ACER INC

15 patents

STARVR CORP

2 patents

STARBREEZE IP LUX II S A R

1 patent

ADAM ELEMENTS INT CO LTD

1 patent

ALEXION PHARMA INC

1 patent

ZHANG YUE

1 patent

IND TECH RES INST

1 patent

HANNSTAR DISPLAY CORP

1 patent

Showing the top 50 of 59 patents by PatentIndex Score.