Inventor
HSU SHENG-CHANG
TW9 patents
⚠️ This page may combine multiple inventors who share the name “HSU SHENG-CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS11209736B2Dec 28, 2021
Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US10508953B2Dec 17, 2019
Method and system for processing substrate by chemical solution in semiconductor manufacturing fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US12282260B2Apr 22, 2025
Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11567400B2Jan 31, 2023
Method of fabricating a photomask and method of inspecting a photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11048163B2Jun 29, 2021
Inspection method of a photomask and an inspection system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10101651B1Oct 16, 2018
Photo mask assembly and optical apparatus including the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US11953448B2Apr 9, 2024
Method for defect inspection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10459332B2Oct 29, 2019
Mask blank and fabrication method thereof, and method of fabricating photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48