Inventor
LU LI-CHIH
TW4 patents
⚠️ This page may combine multiple inventors who share the name “LU LI-CHIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
2 patentsUS10508953B2Dec 17, 2019
Method and system for processing substrate by chemical solution in semiconductor manufacturing fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US10459332B2Oct 29, 2019
Mask blank and fabrication method thereof, and method of fabricating photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48