Inventor
ABE TSUBASA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “ABE TSUBASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSR CORP
10 patentsUS9620378B1Apr 11, 2017
Composition for film formation, film, production method of patterned substrate, and compound
JSR CORP2 citations71
US9958781B2May 1, 2018
Method for film formation, and pattern-forming method
JSR CORP2 citations70
US11003079B2May 11, 2021
Composition for film formation, film, resist underlayer film-forming method, production method of patterned substrate, and compound
JSR CORP1 citations60
US11243468B2Feb 8, 2022
Composition for resist underlayer film formation, resist underlayer film and formation method thereof, and patterned substrate production method
JSR CORP1 citations56
US11320739B2May 3, 2022
Composition for resist underlayer film formation, resist underlayer film and method for producing patterned substrate
JSR CORP0 citations50
US11126084B2Sep 21, 2021
Composition for resist underlayer film formation, resist underlayer film and forming method thereof, production method of patterned substrate, and compound
JSR CORP0 citations50
US12572075B2Mar 10, 2026
Composition, method of forming resist underlayer film, and method of forming resist pattern
JSR CORP0 citations45
US12517433B2Jan 6, 2026
Composition, resist underlayer film, method of forming film, method of producing patterned substrate, and compound
JSR CORP0 citations45
US10520814B2Dec 31, 2019
Resist underlayer film-forming composition, resist underlayer film, resist underlayer film-forming process, and production method of patterned substrate
JSR CORP0 citations40
US10053539B2Aug 21, 2018
Composition for film formation, film, production method of patterned substrate, and compound
JSR CORP0 citations40