Inventor
YU JUN-YIH
TW6 patents
Patents
6 patentsUS11003089B2May 11, 2021
Method and apparatus for dynamic lithographic exposure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67
US11880140B2Jan 23, 2024
Method and apparatus for dynamic lithographic exposure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11520237B2Dec 6, 2022
Method and apparatus for dynamic lithographic exposure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10663868B2May 26, 2020
Method and apparatus for dynamic lithographic exposure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
US10274830B2Apr 30, 2019
Method and apparatus for dynamic lithographic exposure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
US10649336B2May 12, 2020
Method and system for fabricating semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations33