Inventor
HUANG DE-FANG
TW10 patents
⚠️ This page may combine multiple inventors who share the name “HUANG DE-FANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS11003089B2May 11, 2021
Method and apparatus for dynamic lithographic exposure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67
US9601436B2Mar 21, 2017
Method for semiconductor wafer alignment
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations65
US11880140B2Jan 23, 2024
Method and apparatus for dynamic lithographic exposure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11520237B2Dec 6, 2022
Method and apparatus for dynamic lithographic exposure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10663868B2May 26, 2020
Method and apparatus for dynamic lithographic exposure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
US10274830B2Apr 30, 2019
Method and apparatus for dynamic lithographic exposure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
US12572086B2Mar 10, 2026
Apparatus for treating substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45
US9952520B2Apr 24, 2018
Method for semiconductor wafer alignment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45
US9541836B2Jan 10, 2017
Method and apparatus for baking photoresist patterns
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44