Inventor · disambiguated record
Jia-Feng Chang
Also filed as: Chang jia-feng
5 granted patents·2 citations·filing 2017–2022
67Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD5
Top patents by PatentIndex Score
5 records- 0185US11003089B2Method and apparatus for dynamic lithographic exposureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 11, 2021·2 cites·20 claims
- 0271US11520237B2Method and apparatus for dynamic lithographic exposureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 6, 2022·0 cites·20 claims
- 0361US10663868B2Method and apparatus for dynamic lithographic exposureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 26, 2020·0 cites·20 claims
- 0459US11880140B2Method and apparatus for dynamic lithographic exposureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jan 23, 2024·0 cites·20 claims
- 0556US10274830B2Method and apparatus for dynamic lithographic exposureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Apr 30, 2019·0 cites·20 claims
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