Inventor
RODRIGUEZ PATRICIA
US6 patents
⚠️ This page may combine multiple inventors who share the name “RODRIGUEZ PATRICIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patentsUS6723214B2Apr 20, 2004
Apparatus for improved power coupling through a workpiece in a semiconductor wafer processing system
APPLIED MATERIALS INC22 citations90
US7163607B2Jan 16, 2007
Process kit for improved power coupling through a workpiece in a semiconductor wafer processing system
APPLIED MATERIALS INC10 citations82