Inventor
IIDA Yuta
JP11 patents
Patents
11 patentsUS10438982B2Oct 8, 2019
Method for manufacturing semiconductor device including step of simultaneous formation of plurality of contact openings
SEMICONDUCTOR ENERGY LAB13 citations92
US11380688B2Jul 5, 2022
Capacitor, semiconductor device, and manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB6 citations85
US10460984B2Oct 29, 2019
Method for fabricating electrode and semiconductor device
SEMICONDUCTOR ENERGY LAB10 citations84
US11004882B2May 11, 2021
Method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB4 citations83
US11791201B2Oct 17, 2023
Method for fabricating electrode and semiconductor device
SEMICONDUCTOR ENERGY LAB1 citations73
US11729965B2Aug 15, 2023
Capacitor, semiconductor device, and manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB1 citations73
US11004727B2May 11, 2021
Method for fabricating electrode and semiconductor device
SEMICONDUCTOR ENERGY LAB1 citations73
US11574944B2Feb 7, 2023
Method for manufacturing semiconductor device including step of simultaneous formation of plurality of contact openings
SEMICONDUCTOR ENERGY LAB1 citations72
US11133420B2Sep 28, 2021
Semiconductor device and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB4 citations72
US12364041B2Jul 15, 2025
Semiconductor device comprising transistor
SEMICONDUCTOR ENERGY LAB0 citations62
US12041765B2Jul 16, 2024
Capacitor, semiconductor device, and manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations62