Inventor
SHIRAYONE SHIGERU
JP14 patents
⚠️ This page may combine multiple inventors who share the name “SHIRAYONE SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
12 patentsUS12191121B2Jan 7, 2025
Plasma processing apparatus
HITACHI HIGH TECH CORP2 citations74
US11664233B2May 30, 2023
Method for releasing sample and plasma processing apparatus using same
HITACHI HIGH TECH CORP2 citations73
US11257661B2Feb 22, 2022
Plasma processing apparatus
HITACHI HIGH TECH CORP3 citations73
US12112925B2Oct 8, 2024
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations62
US11424108B2Aug 23, 2022
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations62
US11315792B2Apr 26, 2022
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations62
US11107694B2Aug 31, 2021
Method for releasing sample and plasma processing apparatus using same
HITACHI HIGH TECH CORP0 citations62
US10490412B2Nov 26, 2019
Method for releasing sample and plasma processing apparatus using same
HITACHI HIGH TECH CORP0 citations52
US10395935B2Aug 27, 2019
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations52
US9941133B2Apr 10, 2018
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations52
US9607874B2Mar 28, 2017
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations52
US7947189B2May 24, 2011
Vacuum processing apparatus and vacuum processing method of sample
HITACHI HIGH TECH CORP0 citations41