Inventor
KEARNEY STEVEN P
US4 patents
⚠️ This page may combine multiple inventors who share the name “KEARNEY STEVEN P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UCHICAGO ARGONNE LLC
3 patentsUS10663040B2May 26, 2020
Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance
UCHICAGO ARGONNE LLC4 citations67
US12337473B2Jun 24, 2025
Method and mechanical design of a flexure interface for ultra-high-vacuum nanopositioning Invar base near-zero-length feedthrough
UCHICAGO ARGONNE LLC0 citations53
US12234867B2Feb 25, 2025
Constrained flexure mechanism and method for manufacturing the same
UCHICAGO ARGONNE LLC0 citations40