Inventor
ZOPE BHUSHAN
US14 patents
Patents
14 patentsUS11295980B2Apr 5, 2022
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
ASM IP HOLDING BV14 citations92
US11286558B2Mar 29, 2022
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
ASM IP HOLDING BV9 citations83
US12354877B2Jul 8, 2025
Vapor deposition of films comprising molybdenum
ASM IP HOLDING BV4 citations74
US12203166B2Jan 21, 2025
Apparatus and methods for performing an in-situ etch of reaction chambers with fluorine-based radicals
ASM IP HOLDING BV3 citations74
US11946136B2Apr 2, 2024
Semiconductor processing device
ASM IP HOLDING BV2 citations73
US11581220B2Feb 14, 2023
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
ASM IP HOLDING BV4 citations73
US11404302B2Aug 2, 2022
Substrate susceptor using edge purging
ASM IP HOLDING BV4 citations71
US11898242B2Feb 13, 2024
Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film
ASM IP HOLDING BV2 citations69
US12406871B2Sep 2, 2025
Substrate susceptor using edge purging
ASM IP HOLDING BV1 citations63
US12467137B2Nov 11, 2025
Semiconductor processing device
ASM IP HOLDING BV0 citations62
US12215416B2Feb 4, 2025
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
ASM IP HOLDING BV0 citations62
US11908736B2Feb 20, 2024
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
ASM IP HOLDING BV0 citations61
US11827978B2Nov 28, 2023
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
ASM IP HOLDING BV0 citations60
US12033885B2Jul 9, 2024
Channeled lift pin
ASM IP HOLDING BV0 citations48