Inventor
STEVENS ERIC CHRISTOPHER
US8 patents
Patents
8 patentsUS11286558B2Mar 29, 2022
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
ASM IP HOLDING BV9 citations83
US12354877B2Jul 8, 2025
Vapor deposition of films comprising molybdenum
ASM IP HOLDING BV4 citations74
US11898242B2Feb 13, 2024
Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film
ASM IP HOLDING BV2 citations69
US12215416B2Feb 4, 2025
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
ASM IP HOLDING BV0 citations62
US11827978B2Nov 28, 2023
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
ASM IP HOLDING BV0 citations60
US12351903B2Jul 8, 2025
Method and system for depositing molybdenum layers
ASM IP HOLDING BV0 citations59
US11674220B2Jun 13, 2023
Method for depositing molybdenum layers using an underlayer
ASM IP HOLDING BV0 citations59
US12241158B2Mar 4, 2025
Method for forming structures including transition metal layers
ASM IP HOLDING BV1 citations58