Inventor
BRAULT ROBERT G
US9 patents
Patents
9 patentsUS4777119AOct 11, 1988
Method for developing poly(methacrylic anhydride) resists
HUGHES AIRCRAFT CO97 citations95
US4587203AMay 6, 1986
Wet process for developing styrene polymer resists for submicron lithography
HUGHES AIRCRAFT CO28 citations92
US4535054AAug 13, 1985
Wet process for developing styrene polymer resists for submicron lithography
HUGHES AIRCRAFT CO14 citations73
US4981778AJan 1, 1991
Polysiloxane, resist for ion beam and electron beam lithography
HUGHES AIRCRAFT CO11 citations72
US4596761AJun 24, 1986
Graft polymerized SiO2 lithographic masks
HUGHES AIRCRAFT CO11 citations72
US4508812AApr 2, 1985
Method of applying poly(methacrylic anhydride resist to a semiconductor
HUGHES AIRCRAFT CO10 citations72
US4474869AOct 2, 1984
Polyvinylpyridine radiation resists
HUGHES AIRCRAFT CO6 citations62
US4665009AMay 12, 1987
Method of developing radiation sensitive negative resists
HUGHES AIRCRAFT CO3 citations61
US4036647AJul 19, 1977
Package for making photopolymerized plates
HUGHES AIRCRAFT CO2 citations55