Inventor

THURNAUER MARION

US3 patents

⚠️ This page may combine multiple inventors who share the name “THURNAUER MARION”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV CHICAGO

1 patent

US6271130B1Aug 7, 2001

Semiconductor assisted metal deposition for nanolithography applications

UNIV CHICAGO17 citations87

ARGONNE NAT LAB

1 patent

US6410935B1Jun 25, 2002

Semiconductor assisted metal deposition for nanolithography applications

ARGONNE NAT LAB34 citations86

US ENERGY

1 patent

US5225788AJul 6, 1993

Single-bunch synchrotron shutter

US ENERGY0 citations45