Inventor

HEAD LARRY J

US3 patents

Patents

3 patents

US5749160AMay 12, 1998

Multi-zone method for controlling voc and nox emissions in a flatline conveyor wafer drying system

KOCH SONS GEORGE16 citations75

US5524361AJun 11, 1996

Flatline method of drying wafers

KOCH SONS GEORGE15 citations69

US5676755AOct 14, 1997

Flume coater

KOCH SONS GEORGE3 citations59