Inventor
BAKEMAN JR PAUL EVANS
US3 patents
Patents
3 patentsUS5731246AMar 24, 1998
Protection of aluminum metallization against chemical attack during photoresist development
IBM48 citations94
US5952160ASep 14, 1999
Method and system for controlling the relative size of images formed in light-sensitive media
IBM13 citations77
US5764342AJun 9, 1998
Method and system for controlling the relative size of images formed in light-sensitive media
IBM1 citations57