Inventor
SPULER BRUNO
DE13 patents
⚠️ This page may combine multiple inventors who share the name “SPULER BRUNO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SIEMENS AG
5 patentsUS6033984AMar 7, 2000
Dual damascene with bond pads
SIEMENS AG22 citations92
US5935873AAug 10, 1999
Deposition of carbon into nitride layer for improved selectivity of oxide to nitride etchrate for self aligned contact etching
SIEMENS AG21 citations92
US5854126ADec 29, 1998
Method for forming metallization in semiconductor devices with a self-planarizing material
SIEMENS AG30 citations92
US5846884ADec 8, 1998
Methods for metal etching with reduced sidewall build up during integrated circuit manufacturing
SIEMENS AG34 citations89
US6071820AJun 6, 2000
Method for patterning integrated circuit conductors
SIEMENS AG0 citations51
INFINEON TECHNOLOGIES AG
2 patentsUS6379869B1Apr 30, 2002
Method of improving the etch resistance of chemically amplified photoresists by introducing silicon after patterning
INFINEON TECHNOLOGIES AG36 citations92
US6984556B2Jan 10, 2006
Method of forming an isolation layer and method of manufacturing a trench capacitor
INFINEON TECHNOLOGIES AG3 citations57