Inventor
BAJT SASA
US10 patents
⚠️ This page may combine multiple inventors who share the name “BAJT SASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV CALIFORNIA
5 patentsUS6396900B1May 28, 2002
Multilayer films with sharp, stable interfaces for use in EUV and soft X-ray application
UNIV CALIFORNIA155 citations98
US6134049AOct 17, 2000
Method to adjust multilayer film stress induced deformation of optics
UNIV CALIFORNIA71 citations95
US6319635B1Nov 20, 2001
Mitigation of substrate defects in reticles using multilayer buffer layers
UNIV CALIFORNIA26 citations92
US6229652B1May 8, 2001
High reflectance and low stress Mo2C/Be multilayers
UNIV CALIFORNIA26 citations92
US6590209B1Jul 8, 2003
Technique to quantitatively measure magnetic properties of thin structures at <10 NM spatial resolution
UNIV CALIFORNIA10 citations72