Inventor
VERNON STEPHEN P
US8 patents
⚠️ This page may combine multiple inventors who share the name “VERNON STEPHEN P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV CALIFORNIA
5 patentsUS5958605ASep 28, 1999
Passivating overcoat bilayer for multilayer reflective coatings for extreme ultraviolet lithography
UNIV CALIFORNIA115 citations97
US6150060ANov 21, 2000
Defect tolerant transmission lithography mask
UNIV CALIFORNIA20 citations91
US6451176B1Sep 17, 2002
Electrostatic particle trap for ion beam sputter deposition
UNIV CALIFORNIA18 citations89
US6010600AJan 4, 2000
Maskless deposition technique for the physical vapor deposition of thin film and multilayer coatings with subnanometer precision and accuracy
UNIV CALIFORNIA12 citations73
US5698113ADec 16, 1997
Recovery of Mo/Si multilayer coated optical substrates
UNIV CALIFORNIA14 citations68