Inventor
MOROHASHI AKIRA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MOROHASHI AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
3 patentsUS7891975B2Feb 22, 2011
Heat treatment apparatus and method of manufacturing substrate
HITACHI INT ELECTRIC INC9 citations83
US6905963B2Jun 14, 2005
Fabrication of B-doped silicon film by LPCVD method using BCI3 and SiH4 gases
HITACHI INT ELECTRIC INC9 citations67
US7901206B2Mar 8, 2011
Heat-treating apparatus and method of producing substrates
HITACHI INT ELECTRIC INC0 citations40
CANON KK
3 patentsUS9373532B2Jun 21, 2016
Guide apparatus, exposure apparatus, and method of manufacturing article
CANON KK2 citations61
US9280068B2Mar 8, 2016
Stage apparatus with flexible utility line, lithography apparatus, and article manufacturing method
CANON KK0 citations51
US9124151B2Sep 1, 2015
Driving apparatus, exposure apparatus, and method of manufacturing article
CANON KK0 citations50