Inventor
RAY ANDREW M
US17 patents
⚠️ This page may combine multiple inventors who share the name “RAY ANDREW M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
9 patentsUS6953942B1Oct 11, 2005
Ion beam utilization during scanned ion implantation
AXCELIS TECH INC32 citations92
US6903350B1Jun 7, 2005
Ion beam scanning systems and methods for improved ion implantation uniformity
AXCELIS TECH INC46 citations92
US7453160B2Nov 18, 2008
Simplified wafer alignment
AXCELIS TECH INC11 citations84
US6881967B1Apr 19, 2005
Method of correction for wafer crystal cut error in semiconductor processing
AXCELIS TECH INC13 citations84
US6989545B1Jan 24, 2006
Device and method for measurement of beam angle and divergence
AXCELIS TECH INC13 citations83
US6992308B2Jan 31, 2006
Modulating ion beam current
AXCELIS TECH INC9 citations73
US7994487B2Aug 9, 2011
Control of particles on semiconductor wafers when implanting boron hydrides
AXCELIS TECH INC5 citations62
US7417242B2Aug 26, 2008
Method of measuring ion beam position
AXCELIS TECH INC5 citations62
US6940079B2Sep 6, 2005
Method of correction for wafer crystal cut error in semiconductor processing
AXCELIS TECH INC2 citations62
EATON CORP
8 patentsUS5091655AFeb 25, 1992
Reduced path ion beam implanter
EATON CORP64 citations95
US5229615AJul 20, 1993
End station for a parallel beam ion implanter
EATON CORP109 citations93
US5160846ANov 3, 1992
Method and apparatus for reducing tilt angle variations in an ion implanter
EATON CORP38 citations92
US4975586ADec 4, 1990
Ion implanter end station
EATON CORP44 citations92
US4943728AJul 24, 1990
Beam pattern control system for an ion implanter
EATON CORP24 citations92
US4929840AMay 29, 1990
Wafer rotation control for an ion implanter
EATON CORP26 citations92
US5406088AApr 11, 1995
Scan and tilt apparatus for an ion implanter
EATON CORP30 citations89
US4700077AOct 13, 1987
Ion beam implanter control system
EATON CORP18 citations73