Inventor

LOW RUSSELL JOHN

US3 patents

⚠️ This page may combine multiple inventors who share the name “LOW RUSSELL JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

2 patents

US7544958B2Jun 9, 2009

Contamination reduction during ion implantation

VARIAN SEMICONDUCTOR EQUIPMENT30 citations87

US7842934B2Nov 30, 2010

Terminal structures of an ion implanter having insulated conductors with dielectric fins

VARIAN SEMICONDUCTOR EQUIPMENT4 citations57

VARIAN SEMICONDUCTOR EQUPMENT

1 patent

US7586110B1Sep 8, 2009

Techniques for detecting ion beam contamination in an ion implantation system and interlocking same

VARIAN SEMICONDUCTOR EQUPMENT16 citations75