Inventor
Yoo tae hee
KR10 patents
⚠️ This page may combine multiple inventors who share the name “Yoo tae hee”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
9 patentsUS10134757B2Nov 20, 2018
Method of processing a substrate and a device manufactured by using the method
ASM IP HOLDING BV449 citations98
US10714335B2Jul 14, 2020
Method of depositing thin film and method of manufacturing semiconductor device
ASM IP HOLDING BV341 citations97
US10847529B2Nov 24, 2020
Substrate processing method and device manufactured by the same
ASM IP HOLDING BV10 citations83
US10622375B2Apr 14, 2020
Method of processing a substrate and a device manufactured by using the method
ASM IP HOLDING BV9 citations83
US10504901B2Dec 10, 2019
Substrate processing method and device manufactured using the same
ASM IP HOLDING BV10 citations83
US11195845B2Dec 7, 2021
Substrate processing method and device manufactured by the same
ASM IP HOLDING BV3 citations72
US10734244B2Aug 4, 2020
Method of processing a substrate and a device manufactured by the same
ASM IP HOLDING BV6 citations72
US10644025B2May 5, 2020
Method of processing a substrate and a device manufactured by using the method
ASM IP HOLDING BV2 citations72
US10950432B2Mar 16, 2021
Method of depositing thin film and method of manufacturing semiconductor device
ASM IP HOLDING BV0 citations61