Inventor
LIM WAN GYU
KR6 patents
Patents
6 patentsUS10134757B2Nov 20, 2018
Method of processing a substrate and a device manufactured by using the method
ASM IP HOLDING BV449 citations98
US10714335B2Jul 14, 2020
Method of depositing thin film and method of manufacturing semiconductor device
ASM IP HOLDING BV341 citations97
US10622375B2Apr 14, 2020
Method of processing a substrate and a device manufactured by using the method
ASM IP HOLDING BV9 citations83
US10644025B2May 5, 2020
Method of processing a substrate and a device manufactured by using the method
ASM IP HOLDING BV2 citations72
US10381226B2Aug 13, 2019
Method of processing substrate
ASM IP HOLDING BV1 citations62
US10950432B2Mar 16, 2021
Method of depositing thin film and method of manufacturing semiconductor device
ASM IP HOLDING BV0 citations61