Inventor

MORO SHOUKEN

JP2 patents

⚠️ This page may combine multiple inventors who share the name “MORO SHOUKEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUKUDA YOSHITERU

1 patent

US8138456B2Mar 20, 2012

Heat processing method, computer-readable storage medium, and heat processing apparatus

FUKUDA YOSHITERU24 citations86

MORO SHOUKEN

1 patent

US8748780B2Jun 10, 2014

Substrate processing apparatus, substrate processing method, and computer-readable storage medium

MORO SHOUKEN17 citations77