Inventor

TENNER MANFRED GAWEIN

NL5 patents

⚠️ This page may combine multiple inventors who share the name “TENNER MANFRED GAWEIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEWELL HARRY

2 patents

US8625096B2Jan 7, 2014

Method and system for increasing alignment target contrast

SEWELL HARRY3 citations60

US8709908B2Apr 29, 2014

Improving alignment target contrast in a lithographic double patterning process

SEWELL HARRY1 citations50

BIJNEN FRANCISCUS GODEFRIDUS CASPER

1 patent

US8208121B2Jun 26, 2012

Alignment mark and a method of aligning a substrate comprising such an alignment mark

BIJNEN FRANCISCUS GODEFRIDUS CASPER24 citations89

ASML NETHERLANDS BV

1 patent

US9753377B2Sep 5, 2017

Deformation pattern recognition method, pattern transferring method, processing device monitoring method, and lithographic apparatus

ASML NETHERLANDS BV2 citations69

ASML HOLDING NV

1 patent

US8980724B2Mar 17, 2015

Alignment target contrast in a lithographic double patterning process

ASML HOLDING NV0 citations50