Inventor

PAGLIARO ROBERT HENRY

US2 patents

⚠️ This page may combine multiple inventors who share the name “PAGLIARO ROBERT HENRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APET

1 patent

US10037881B2Jul 31, 2018

Wafer cleaning apparatus and wafer cleaning method using the same

APET0 citations41

PAGLIARO ROBERT HENRY

1 patent

US9240335B2Jan 19, 2016

Wafer cleaning apparatus and wafer cleaning method using the same

PAGLIARO ROBERT HENRY0 citations41