Inventor
HATTA MASATAKA
JP13 patents
⚠️ This page may combine multiple inventors who share the name “HATTA MASATAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS6037793AMar 14, 2000
Inspecting method and apparatus for semiconductor integrated circuit
TOKYO ELECTRON LTD111 citations98
US5198752AMar 30, 1993
Electric probing-test machine having a cooling system
TOKYO ELECTRON LTD231 citations98
US5084671AJan 28, 1992
Electric probing-test machine having a cooling system
TOKYO ELECTRON LTD372 citations98
US6032724AMar 7, 2000
Temperature control apparatus for sample susceptor
TOKYO ELECTRON LTD71 citations95
US9562942B2Feb 7, 2017
Probe apparatus
TOKYO ELECTRON LTD3 citations72
US7818972B2Oct 26, 2010
Water removal apparatus and inspection apparatus including same
TOKYO ELECTRON LTD3 citations62
US7610756B2Nov 3, 2009
Cooling/heating apparatus and mounting apparatus
TOKYO ELECTRON LTD3 citations62
US6959556B2Nov 1, 2005
Stirling refrigeration system
TOKYO ELECTRON LTD5 citations61
US7975759B2Jul 12, 2011
Temperature control method, temperature control apparatus and high/low temperature processing system
TOKYO ELECTRON LTD2 citations53
US9891274B2Feb 13, 2018
Device test method
TOKYO ELECTRON LTD0 citations41
US9739828B2Aug 22, 2017
Probe device
TOKYO ELECTRON LTD0 citations41
US7641453B2Jan 5, 2010
Pulsation reducing apparatus and inspection apparatus
TOKYO ELECTRON LTD0 citations41