Inventor · disambiguated record

Tsang-Yang Liu

Also filed as: LIU TSANG-YANG

3 granted patents·5 citations·filing 2013–2020

60Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG CO LTD3

Top patents by PatentIndex Score

3 records

0181US10748806B2Apparatus and system for preventing backside peeling defects on semiconductor wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 18, 2020·2 cites·18 claims
0278US10163676B2Apparatus and system for preventing backside peeling defects on semiconductor wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Dec 25, 2018·3 cites·18 claims
0367US12080587B2Apparatus for preventing backside peeling defects on semiconductor wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Sep 3, 2024·0 cites·20 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →