P

Inventor

LEE CHANG-SHENG

TW24 patents
⚠️ This page may combine multiple inventors who share the name “LEE CHANG-SHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

15 patents
US9425109B2Aug 23, 2016

Planarization method, method for polishing wafer, and CMP system

TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US11088262B2Aug 10, 2021

Radical etching in gate formation

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations78
US9412671B1Aug 9, 2016

Method for controlling processing temperature in semiconductor fabrication

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations77
US9553160B2Jan 24, 2017

Mechanisms for monitoring impurity in high-K dielectric film

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10748806B2Aug 18, 2020

Apparatus and system for preventing backside peeling defects on semiconductor wafers

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10163676B2Dec 25, 2018

Apparatus and system for preventing backside peeling defects on semiconductor wafers

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11458586B2Oct 4, 2022

Planarization method, method for polishing wafer, and CMP system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12080587B2Sep 3, 2024

Apparatus for preventing backside peeling defects on semiconductor wafers

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12382694B2Aug 5, 2025

Radical etching in gate formation

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US9384949B2Jul 5, 2016

Gas-flow control method for plasma apparatus

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations56
US10166650B2Jan 1, 2019

Chemical-mechanical planarization system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10113228B2Oct 30, 2018

Method for controlling semiconductor deposition operation

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9611546B2Apr 4, 2017

Solid precursor delivery system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9343315B2May 17, 2016

Method for fabricating semiconductor structure, and solid precursor delivery system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9803274B2Oct 31, 2017

Process kit of physical vapor deposition chamber and fabricating method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48

TAIWAN SEMICONDUCTOR MFG

3 patents

BENQ CORP

2 patents

BENQ INTELLIGENT TECH SHANGHAI CO LTD

2 patents

WORLDWIDE SEMICONDUCTOR MFG

1 patent

PROCTER & GAMBLE

1 patent