Inventor
LEE CHANG-SHENG
TW24 patents
⚠️ This page may combine multiple inventors who share the name “LEE CHANG-SHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
15 patentsUS9425109B2Aug 23, 2016
Planarization method, method for polishing wafer, and CMP system
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US11088262B2Aug 10, 2021
Radical etching in gate formation
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations78
US9412671B1Aug 9, 2016
Method for controlling processing temperature in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations77
US9553160B2Jan 24, 2017
Mechanisms for monitoring impurity in high-K dielectric film
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10748806B2Aug 18, 2020
Apparatus and system for preventing backside peeling defects on semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10163676B2Dec 25, 2018
Apparatus and system for preventing backside peeling defects on semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11458586B2Oct 4, 2022
Planarization method, method for polishing wafer, and CMP system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12080587B2Sep 3, 2024
Apparatus for preventing backside peeling defects on semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12382694B2Aug 5, 2025
Radical etching in gate formation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US9384949B2Jul 5, 2016
Gas-flow control method for plasma apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations56
US10166650B2Jan 1, 2019
Chemical-mechanical planarization system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10113228B2Oct 30, 2018
Method for controlling semiconductor deposition operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9611546B2Apr 4, 2017
Solid precursor delivery system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9343315B2May 17, 2016
Method for fabricating semiconductor structure, and solid precursor delivery system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9803274B2Oct 31, 2017
Process kit of physical vapor deposition chamber and fabricating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
TAIWAN SEMICONDUCTOR MFG
3 patentsUS9362385B2Jun 7, 2016
Method for tuning threshold voltage of semiconductor device with metal gate structure
TAIWAN SEMICONDUCTOR MFG14 citations84
US9228114B2Jan 5, 2016
Composition and method for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG3 citations73
US9227294B2Jan 5, 2016
Apparatus and method for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG5 citations73
BENQ CORP
2 patentsBENQ INTELLIGENT TECH SHANGHAI CO LTD
2 patentsUS11765327B2Sep 19, 2023
Method and control system for controlling projectors of different models by using control codes
BENQ INTELLIGENT TECH SHANGHAI CO LTD0 citations58
US11265593B2Mar 1, 2022
Display device, hardware dongle capable of coupling to the display device, and method for controlling the display device
BENQ INTELLIGENT TECH SHANGHAI CO LTD0 citations51