Inventor
LIAO WEI-CHEN
TW10 patents
⚠️ This page may combine multiple inventors who share the name “LIAO WEI-CHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS10748806B2Aug 18, 2020
Apparatus and system for preventing backside peeling defects on semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10163676B2Dec 25, 2018
Apparatus and system for preventing backside peeling defects on semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12080587B2Sep 3, 2024
Apparatus for preventing backside peeling defects on semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12077850B2Sep 3, 2024
Physical vapor deposition apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12480204B2Nov 25, 2025
Physical vapor deposition apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US9803274B2Oct 31, 2017
Process kit of physical vapor deposition chamber and fabricating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US11955322B2Apr 9, 2024
Device for adjusting position of chamber and plasma process chamber including the same for semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US11587802B2Feb 21, 2023
Semiconductor fabrication tool having gas manifold assembled by jig
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations43