Inventor
Wu xu-sheng
TW6 patents
Patents
6 patentsUS11075283B2Jul 27, 2021
Dielectric constant reduction of gate spacer
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67
US12062707B2Aug 13, 2024
Method of manufacturing a field effect transistor by tilted implantation of dopants into inner sidewalls of gate spacers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11688647B2Jun 27, 2023
Semiconductor device and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11355615B2Jun 7, 2022
FinFET having fluorine-doped gate sidewall spacers
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US11081401B2Aug 3, 2021
Semiconductor device and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US12453154B2Oct 21, 2025
Dielectric constant reduction of gate spacer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56