Inventor
ATSUMI HIRONORI
JP4 patents
Patents
4 patentsUS11427929B2Aug 30, 2022
Wafer supporting mechanism, chemical vapor deposition apparatus, and epitaxial wafer manufacturing method
SHOWA DENKO KK2 citations70
US11326275B2May 10, 2022
SiC epitaxial growth apparatus having purge gas supply ports which surround a vicinity of a raw material gas supply port
SHOWA DENKO KK2 citations67
US11424147B2Aug 23, 2022
Deposition apparatus having particular arrangement of raw material supply port, partition plate, and opening for measuring a temperature
SHOWA DENKO KK0 citations48
US11390949B2Jul 19, 2022
SiC chemical vapor deposition apparatus and method of manufacturing SiC epitaxial wafer
SHOWA DENKO KK0 citations46