Inventor
MIYAZAKI KAZUHITO
JP7 patents
Patents
7 patentsUS7908995B2Mar 22, 2011
Stage apparatus and application processing apparatus
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US9836844B2Dec 5, 2017
Coating apparatus and coating method
TOKYO ELECTRON LTD2 citations66
US11633969B2Apr 25, 2023
Droplet ejecting apparatus and droplet ejecting method in which relative positions of workpiece table and droplet ejecting head are corrected
TOKYO ELECTRON LTD2 citations55
US10850507B2Dec 1, 2020
Substrate coating device having moving unit for moving substrate holding unit and droplet discharging unit in main scanning direction and sub scanning direction and method
TOKYO ELECTRON LTD1 citations55
US11571706B2Feb 7, 2023
Droplet ejecting apparatus having carriage marks, droplet ejecting method, and computer storage medium
TOKYO ELECTRON LTD1 citations51
US11623237B2Apr 11, 2023
Droplet ejecting apparatus having correctable movement mechanism for workpiece table and droplet ejecting method
TOKYO ELECTRON LTD0 citations45
US10991608B2Apr 27, 2021
Substrate coating apparatus for floating substrate and method
TOKYO ELECTRON LTD0 citations44