Inventor
KAKINO AKIRA
JP3 patents
Patents
3 patentsUS9836844B2Dec 5, 2017
Coating apparatus and coating method
TOKYO ELECTRON LTD2 citations66
US11633969B2Apr 25, 2023
Droplet ejecting apparatus and droplet ejecting method in which relative positions of workpiece table and droplet ejecting head are corrected
TOKYO ELECTRON LTD2 citations55
US11623237B2Apr 11, 2023
Droplet ejecting apparatus having correctable movement mechanism for workpiece table and droplet ejecting method
TOKYO ELECTRON LTD0 citations45