Inventor
YOSHITOMI WATARU
JP4 patents
Patents
4 patentsUS11633969B2Apr 25, 2023
Droplet ejecting apparatus and droplet ejecting method in which relative positions of workpiece table and droplet ejecting head are corrected
TOKYO ELECTRON LTD2 citations55
US11571706B2Feb 7, 2023
Droplet ejecting apparatus having carriage marks, droplet ejecting method, and computer storage medium
TOKYO ELECTRON LTD1 citations51
US11623237B2Apr 11, 2023
Droplet ejecting apparatus having correctable movement mechanism for workpiece table and droplet ejecting method
TOKYO ELECTRON LTD0 citations45
US11577269B2Feb 14, 2023
Workpiece processing apparatus using workpiece having reference marks, workpiece processing method, and computer storage medium
TOKYO ELECTRON LTD0 citations37