Inventor
GUPTA AWNISH
US8 patents
⚠️ This page may combine multiple inventors who share the name “GUPTA AWNISH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS10615169B2Apr 7, 2020
Selective deposition of SiN on horizontal surfaces
LAM RES CORP5 citations71
US12037686B2Jul 16, 2024
Selective carbon deposition
LAM RES CORP0 citations61
US12412742B2Sep 9, 2025
Impurity reduction in silicon-containing films
LAM RES CORP1 citations60
US12417943B2Sep 16, 2025
Reducing intralevel capacitance in semiconductor devices
LAM RES CORP0 citations58
US12288685B2Apr 29, 2025
Modifying hydrophobicity of a wafer surface using an organosilicon precursor
LAM RES CORP0 citations53
US12431349B2Sep 30, 2025
In-situ control of film properties during atomic layer deposition
LAM RES CORP0 citations48
US12157945B2Dec 3, 2024
Thermal atomic layer deposition of silicon-containing films
LAM RES CORP0 citations47