Inventor
DURUKAN ILKER
US9 patents
Patents
9 patentsUS10167553B2Jan 1, 2019
Apparatus and method for providing a uniform flow of gas
APPLIED MATERIALS INC7 citations82
US10519546B2Dec 31, 2019
Apparatus and method for providing a uniform flow of gas
APPLIED MATERIALS INC5 citations71
US11853042B2Dec 26, 2023
Part, sensor, and metrology data integration
APPLIED MATERIALS INC2 citations68
US12315745B2May 27, 2025
Heater cover plate for uniformity improvement
APPLIED MATERIALS INC0 citations61
US11566327B2Jan 31, 2023
Methods and apparatus to reduce pressure fluctuations in an ampoule of a chemical delivery system
APPLIED MATERIALS INC0 citations61
US11562914B2Jan 24, 2023
Heater cover plate for uniformity improvement
APPLIED MATERIALS INC0 citations61
US10879090B2Dec 29, 2020
High temperature process chamber lid
APPLIED MATERIALS INC0 citations51
US9831109B2Nov 28, 2017
High temperature process chamber lid
APPLIED MATERIALS INC0 citations51
US9914632B2Mar 13, 2018
Methods and apparatus for liquid chemical delivery
APPLIED MATERIALS INC0 citations40