P

Inventor

ASAUMI SHINGO

JP12 patents

Patents

12 patents
US4833067AMay 23, 1989

Developing solution for positive-working photoresist comprising tmah and non-ionic surfactant

TOKYO OHKA KOGYO CO LTD75 citations96
US4824762AApr 25, 1989

Method for rinse treatment of a substrate

TOKYO OHKA KOGYO CO LTD55 citations96
US4385086AMay 24, 1983

Method for preventing leaching of contaminants from solid surfaces

TOKYO OHKA KOGYO CO LTD75 citations96
US4844832AJul 4, 1989

Containing an arylsulfonic acid, a phenol and a naphalenic solvent

TOKYO OHKA KOGYO CO LTD31 citations92
US4784937ANov 15, 1988

Developing solution for positive-working photoresist comprising a metal ion free organic base and an anionic surfactant

TOKYO OHKA KOGYO CO LTD35 citations92
US4738915AApr 19, 1988

Positive-working O-quinone diazide photoresist composition with 2,3,4-trihydroxybenzophenone

TOKYO OHKA KOGYO CO LTD31 citations92
US4731319AMar 15, 1988

Positive-working naphthoquinone diazide photoresist composition with two cresol novolac resins

TOKYO OHKA KOGYO CO LTD48 citations92
US4882260ANov 21, 1989

Positive-working photosensitive quinone diazide composition with alkali insoluble dye and alkali soluble dye

TOKYO OHKA KOGYO CO LTD19 citations81
US4804612AFeb 14, 1989

Highly heat-resistant positive-working o-quinone diazide containing photoresist composition with novolac resin made from phenol with ethylenic unsaturation

TOKYO OHKA KOGYO CO LTD17 citations74
US4906549AMar 6, 1990

Positive-working photoresist composition with quinone diazide sulfonic acid ester and novolac made from m-cresol, p-cresol and aliphatic phenol with 2-6 carbon atoms

TOKYO OHKA KOGYO CO LTD15 citations73
US4174222ANov 13, 1979

Positive-type O-quinone diazide containing photoresist compositions

TOKYO OHKA KOGYO CO LTD16 citations71
US5281508AJan 25, 1994

Positive-working photoresist containing o-naphthoquinone diazide sulfonic acid ester and novolak resin consisting of 35 to 43% m-cresol and 65 to 57% p-cresol with substantial absence of o-cresol

TOKYO OHKA KOGYO CO LTD4 citations62