Inventor
YAMAZAKI HIROTO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “YAMAZAKI HIROTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
7 patentsUS9766541B2Sep 19, 2017
Positive-type resist composition, method for forming resist pattern, photo-reactive quencher, and polymeric compound
TOKYO OHKA KOGYO CO LTD10 citations83
US11281099B2Mar 22, 2022
Resist composition, method of forming resist pattern, compound, acid generator, and method of producing compound
TOKYO OHKA KOGYO CO LTD2 citations72
US11256169B2Feb 22, 2022
Resist composition, and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD7 citations71
US11667605B2Jun 6, 2023
Resist composition, method of forming resist pattern, compound, acid generator, and method of producing compound
TOKYO OHKA KOGYO CO LTD0 citations61
US10606174B2Mar 31, 2020
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD1 citations61
US10976661B2Apr 13, 2021
Resist composition, method of forming resist pattern, and polymer compound
TOKYO OHKA KOGYO CO LTD0 citations50
US11762288B2Sep 19, 2023
Resist composition, method of forming resist pattern, and acid diffusion-controlling agent
TOKYO OHKA KOGYO CO LTD0 citations41