Inventor
YAHAGI MASAHITO
JP22 patents
⚠️ This page may combine multiple inventors who share the name “YAHAGI MASAHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
21 patentsUS8883396B2Nov 11, 2014
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD7 citations83
US11586111B2Feb 21, 2023
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations72
US11275306B2Mar 15, 2022
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations72
US10101658B2Oct 16, 2018
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD6 citations72
US11372329B2Jun 28, 2022
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD4 citations71
US10394122B2Aug 27, 2019
Resist composition, method for forming resist pattern, compound, and acid generator
TOKYO OHKA KOGYO CO LTD6 citations71
US12099298B2Sep 24, 2024
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations62
US11392033B2Jul 19, 2022
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD1 citations62
US10606174B2Mar 31, 2020
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD1 citations61
US12411408B2Sep 9, 2025
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
US11693313B2Jul 4, 2023
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
US11656549B2May 23, 2023
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
US11204551B2Dec 21, 2021
Resist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
US11187981B2Nov 30, 2021
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
US12449729B2Oct 21, 2025
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations50
US10976661B2Apr 13, 2021
Resist composition, method of forming resist pattern, and polymer compound
TOKYO OHKA KOGYO CO LTD0 citations50
US10066096B2Sep 4, 2018
Method of producing structure containing phase-separated structure and resin composition for forming phase-separated structure
TOKYO OHKA KOGYO CO LTD0 citations41
US9964851B2May 8, 2018
Resist pattern forming method and developer for lithography
TOKYO OHKA KOGYO CO LTD0 citations41
US9821338B2Nov 21, 2017
Method of producing structure containing phase-separated structure utilizing a brush composition comprising PS-PMMA
TOKYO OHKA KOGYO CO LTD0 citations41
US9776208B2Oct 3, 2017
Brush composition, and method of producing structure containing phase-separated structure
TOKYO OHKA KOGYO CO LTD0 citations41
US10241406B2Mar 26, 2019
Resist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations40