Inventor
RICH DAVID BOYD
US5 patents
⚠️ This page may combine multiple inventors who share the name “RICH DAVID BOYD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DELPHI TECH INC
4 patentsUS6428713B1Aug 6, 2002
MEMS sensor structure and microfabrication process therefor
DELPHI TECH INC111 citations94
US6257062B1Jul 10, 2001
Angular Accelerometer
DELPHI TECH INC56 citations93
US7077007B2Jul 18, 2006
Deep reactive ion etching process and microelectromechanical devices formed thereby
DELPHI TECH INC27 citations91
US6685844B2Feb 3, 2004
Deep reactive ion etching process and microelectromechanical devices formed thereby
DELPHI TECH INC20 citations91