Inventor
FISCHER ANDREAS
SE194 patents
⚠️ This page may combine multiple inventors who share the name “FISCHER ANDREAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
19 patentsUS6770166B1Aug 3, 2004
Apparatus and method for radio frequency de-coupling and bias voltage control in a plasma reactor
LAM RES CORP185 citations99
US7244336B2Jul 17, 2007
Temperature controlled hot edge ring assembly for reducing plasma reactor etch rate drift
LAM RES CORP67 citations98
US6242360B1Jun 5, 2001
Plasma processing system apparatus, and method for delivering RF power to a plasma processing
LAM RES CORP107 citations98
US6841943B2Jan 11, 2005
Plasma processor with electrode simultaneously responsive to plural frequencies
LAM RES CORP115 citations96
US6744212B2Jun 1, 2004
Plasma processing apparatus and method for confining an RF plasma under very high gas flow and RF power density conditions
LAM RES CORP94 citations95
US7837826B2Nov 23, 2010
Hybrid RF capacitively and inductively coupled plasma source using multifrequency RF powers and methods of use thereof
LAM RES CORP22 citations93
US7740736B2Jun 22, 2010
Methods and apparatus for preventing plasma un-confinement events in a plasma processing chamber
LAM RES CORP40 citations93
US7578258B2Aug 25, 2009
Methods and apparatus for selective pre-coating of a plasma processing chamber
LAM RES CORP16 citations93
US7244311B2Jul 17, 2007
Heat transfer system for improved semiconductor processing uniformity
LAM RES CORP33 citations93
US7026174B2Apr 11, 2006
Method for reducing wafer arcing
LAM RES CORP24 citations93
US6562190B1May 13, 2003
System, apparatus, and method for processing wafer using single frequency RF power in plasma processing chamber
LAM RES CORP36 citations93
US6403322B1Jun 11, 2002
Acoustic detection of dechucking and apparatus therefor
LAM RES CORP15 citations93
US7861667B2Jan 4, 2011
Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode
LAM RES CORP23 citations92
US7597816B2Oct 6, 2009
Wafer bevel polymer removal
LAM RES CORP21 citations92
US7829468B2Nov 9, 2010
Method and apparatus to detect fault conditions of plasma processing reactor
LAM RES CORP22 citations90
US7879184B2Feb 1, 2011
Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts
LAM RES CORP12 citations84
US7837825B2Nov 23, 2010
Confined plasma with adjustable electrode area ratio
LAM RES CORP19 citations84
US7722778B2May 25, 2010
Methods and apparatus for sensing unconfinement in a plasma processing chamber
LAM RES CORP18 citations82
US10256108B2Apr 9, 2019
Atomic layer etching of AL2O3 using a combination of plasma and vapor treatments
LAM RES CORP7 citations81
OREXO AB
5 patentsUS10653690B1May 19, 2020
Pharmaceutical composition for nasal delivery
OREXO AB31 citations93
US10729687B1Aug 4, 2020
Pharmaceutical composition for nasal delivery
OREXO AB11 citations84
US9439900B2Sep 13, 2016
Abuse-resistant pharmaceutical composition for the treatment of opioid dependence
OREXO AB5 citations84
US9259421B2Feb 16, 2016
Abuse-resistant pharmaceutical composition for the treatment of opioid dependence
OREXO AB5 citations84
US8940330B2Jan 27, 2015
Abuse-resistant pharmaceutical composition for the treatment of opioid dependence
OREXO AB5 citations84
FISCHER ANDREAS
5 patentsUS8443756B2May 21, 2013
Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses
FISCHER ANDREAS16 citations93
USD675687SFeb 5, 2013
Stationary bicycle
FISCHER ANDREAS34 citations93
US8069817B2Dec 6, 2011
Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses
FISCHER ANDREAS26 citations93
US9887069B2Feb 6, 2018
Controlling ion energy distribution in plasma processing systems
FISCHER ANDREAS10 citations84
US8522715B2Sep 3, 2013
Methods and apparatus for a wide conductance kit
FISCHER ANDREAS11 citations84
BEHR SYSTEMS INC
3 patentsBASF AG
3 patentsDUERR SYSTEMS GMBH
2 patentsDHINDSA RAJINDER
2 patentsHUDSON ERIC
1 patentDEGUSSA
1 patentDURR SYSTEMS INC
1 patentGRUENENTHAL GMBH
1 patentFORSCHUNGSZENTRUM JUELICH GMBH
1 patentZEISS CARL JENA GMBH
1 patentNOLTE HANS-JURGEN
1 patentVTI VENTIL TECHNIK GMBH
1 patentBAYER AG
1 patentVETTER KURT
1 patentGE INSPECTION TECHNOLOGIES LP
1 patentShowing the top 50 of 194 patents by PatentIndex Score.