Inventor
NARAKI TSUYOSHI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NARAKI TSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
9 patentsUS5579147ANov 26, 1996
Scanning light exposure apparatus
NIKON CORP491 citations98
US5581075ADec 3, 1996
Multi-beam scanning projection exposure apparatus and method with beam monitoring and control for uniform exposure of large area
NIKON CORP64 citations96
US6134007AOct 17, 2000
Method for measuring orthogonality having a third interferometer which is not orthogonal
NIKON CORP80 citations95
US5625436AApr 29, 1997
Scanning type exposure apparatus and exposure method
NIKON CORP73 citations95
US5668624ASep 16, 1997
Scan type exposure apparatus
NIKON CORP24 citations92
US5207505AMay 4, 1993
Illumination light source device
NIKON CORP39 citations91
US6239861B1May 29, 2001
Exposure method and scanning type exposure apparatus
NIKON CORP10 citations73
US6479832B1Nov 12, 2002
Surface height detecting apparatus and exposure apparatus using the same
NIKON CORP11 citations72
US5995225ANov 30, 1999
Method for measuring orthogonality in a stage of an exposure apparatus
NIKON CORP3 citations61