Inventor
WAKE TOMOKO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “WAKE TOMOKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC ELECTRONICS CORP
5 patentsUS6530968B2Mar 11, 2003
Chemical mechanical polishing slurry
NEC ELECTRONICS CORP109 citations97
US6585568B2Jul 1, 2003
Chemical mechanical polishing slurry
NEC ELECTRONICS CORP54 citations95
US6725119B1Apr 20, 2004
Cleaning-apparatus line configuration and designing process therefor
NEC ELECTRONICS CORP51 citations91
US6585786B2Jul 1, 2003
Slurry for chemical mechanical polishing
NEC ELECTRONICS CORP16 citations83
US6930037B2Aug 16, 2005
Process for forming a metal interconnect
NEC ELECTRONICS CORP6 citations62
NEC CORP
4 patentsUS6436811B1Aug 20, 2002
Method of forming a copper-containing metal interconnect using a chemical mechanical planarization (CMP) slurry
NEC CORP60 citations95
US6319801B1Nov 20, 2001
Method for cleaning a substrate and cleaning solution
NEC CORP33 citations92
US6478834B2Nov 12, 2002
Slurry for chemical mechanical polishing
NEC CORP13 citations73
US6867139B2Mar 15, 2005
Method of manufacturing semiconductor device
NEC CORP1 citations51