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Inventor
ITAKURA TETSUYUKI
JP
5 patents
⚠️ This page may combine multiple inventors who share the name “ITAKURA TETSUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC ELECTRONICS CORP
3 patents
US6530968B2
Mar 11, 2003
Chemical mechanical polishing slurry
NEC ELECTRONICS CORP
109 citations
97
US6585568B2
Jul 1, 2003
Chemical mechanical polishing slurry
NEC ELECTRONICS CORP
54 citations
95
US6585786B2
Jul 1, 2003
Slurry for chemical mechanical polishing
NEC ELECTRONICS CORP
16 citations
83
TOKYO MAGNETIC PRINTING
1 patent
US6444132B1
Sep 3, 2002
Free abrasive slurry compositions
TOKYO MAGNETIC PRINTING
20 citations
91
NEC CORP
1 patent
US6478834B2
Nov 12, 2002
Slurry for chemical mechanical polishing
NEC CORP
13 citations
73