Inventor
MINAMITSU AKIHITO
JP2 patents
Patents
2 patentsUS6700370B2Mar 2, 2004
Apparatus for measuring the thickness of a thin film having eddy current coil sensor
ULVAC INC34 citations90
US6753964B2Jun 22, 2004
Axis determination apparatus, film-thickness measurement apparatus, deposition apparatus, axis determination method, and film-thickness measurement method
ULVAC INC7 citations70